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Semiconductor surface doping by electron beam melting of thin evaporated layers

✍ Scribed by A. Munitz; Z. Burshtein; M. Bamberger

Book ID
113186962
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
550 KB
Volume
20
Category
Article
ISSN
0025-5408

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## Abstract The structural properties of carbon thin films synthesized under an atmosphere of nitrogen by means of electron beam evaporation were studied by Raman scattering spectroscopy. The electron beam evaporation technique is an important alternative to grown layers of this material with inter