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SEM and AES depth profile studies of thin titanium and titanium oxide films covered by nanoscale evaporated Au layers

โœ Scribed by A. H. J. van den Berg; W. Lisowski; M. Smithers


Publisher
Springer
Year
1999
Tongue
English
Weight
842 KB
Volume
365
Category
Article
ISSN
1618-2650

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Characterization of titanium hydride fil
โœ Lisowski, W.; van den Berg, A. H. J.; Leonard, D.; Mathieu, H. J. ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 98 KB ๐Ÿ‘ 2 views

Thin titanium hydride (TiH y ) films, covered by ultrathin gold layers, have been compared with the corresponding titanium films after analysis using a combination of time-of-flight SIMS (ToF-SIMS), XPS and AES. The TiH y layers were prepared under UHV conditions by precisely controlled hydrogen sor