Characterization of titanium hydride fil
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Lisowski, W.; van den Berg, A. H. J.; Leonard, D.; Mathieu, H. J.
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Article
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2000
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John Wiley and Sons
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English
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Thin titanium hydride (TiH y ) films, covered by ultrathin gold layers, have been compared with the corresponding titanium films after analysis using a combination of time-of-flight SIMS (ToF-SIMS), XPS and AES. The TiH y layers were prepared under UHV conditions by precisely controlled hydrogen sor