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Self-assembling MEMS variable and fixed RF inductors

✍ Scribed by Lubecke, V.M.; Barber, B.; Chan, E.; Lopez, D.; Gross, M.E.; Gammel, P.

Book ID: 114554176
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 143 KB
Volume: 49
Category: Article
ISSN: 0018-9480
DOI: 10.1109/22.963142

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