RF MEMS tunable filter using micro fixed–fixed beam

✍ Scribed by Md. Fokhrul Islam; Mohd Alauddin Mohd Ali; Burhanuddin Yeop Majlis

• Book ID: 102949500
• Publisher: John Wiley and Sons
• Year: 2010
• Tongue: English
• Weight: 538 KB
• Volume: 52
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.24981

✦ Synopsis

Abstract

In this article, a tunable bandpass filter using micro fixed‐fixed beam structure is designed, simulated, and fabricated. The filter is designed by micromachined capacitive bridges, with an original passive topology. The fabricated filter occupies a chip area of 12 × 3 mm^2^ and achieved an insertion loss of less than 2 dB and return loss of less than −15 dB throughout the operation band, thereby tuning the filter centre frequency by 11% between 8.76 and 9.8 GHz. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 592–597, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24981