A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- 22-MHz Polysilicon Clamped-Clamped Beam Resonators

✍ Scribed by Lopez, J.L.; Verd, J.; Uranga, A.; Giner, J.; Murillo, G.; Torres, F.; Abadal, G.; Barniol, N.

• Book ID: 115537995
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 337 KB
• Volume: 30
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/led.2009.2022509