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Self-assembled film thickness determination by focused ion beam

✍ Scribed by J. Dejeu; R. Salut; M. Spajer; F. Membrey; A. Foissy; D. Charraut

Book ID: 108060518
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 812 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.02.114

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