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Preferential ordering of self-assembled Ge islands on focused ion-beam patterned Si(100)

✍ Scribed by K. Das; S. Das; R. K. Singha; S. K. Ray; A. K. Raychaudhuri


Book ID
106478248
Publisher
Springer Netherlands
Year
2012
Tongue
English
Weight
718 KB
Volume
14
Category
Article
ISSN
1388-0764

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A site-selective growth of self-organized InAs quantum dots (QDs) employing a combination of in-situ focused ion beam (FIB) implantation and self-organized molecular beam epitaxy (MBE) growth has been successfully demonstrated. First, a buffer layer of GaAs was grown by MBE before a square lattice o