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Self-aligned process for the development of surface stress capacitive biosensor arrays

โœ Scribed by V. Tsouti; M.K. Filippidou; C. Boutopoulos; P. Broutas; I. Zergioti; S. Chatzandroulis


Book ID
113905457
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
860 KB
Volume
166-167
Category
Article
ISSN
0925-4005

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