✦ LIBER ✦
Use of screening and response surface experimental designs for development of a 0.5 μm CMOS self-aligned titanium silicide process : Robert E. Jones and Thomas C. Mele. IEEE Trans. Semicond. Mfg 4(4), 281 (1991)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 108 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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