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Selectivity Modification of SnO2-Based Materials for Gas Sensor Arrays

✍ Scribed by V. Krivetskiy; A. Ponzoni; E. Comini; S. Badalyan; M. Rumyantseva; A. Gaskov


Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
368 KB
Volume
22
Category
Article
ISSN
1040-0397

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Laser-assisted chemical vapor deposition (LCVD) was utilized to produce SnO 2 films from SnBr 4 plus air, O 2 or N 2 O. SnO 2 films were successfully generated using either 222 or 308 nm laser pulses but there was evidence for film contamination when using less than 60 mJ/ pulse laser energies at 22