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Selective growth of well-aligned carbon nanotubes by APCVD

โœ Scribed by Hung-Hsin Chen; Wu-Yih Uen; Chien-Te Ku; Shan-Ming Lan; Tsun-Neng Yang; Zhen-Yu Li; Chin-Chen Chiang


Book ID
106398115
Publisher
Springer US
Year
2008
Tongue
English
Weight
364 KB
Volume
20
Category
Article
ISSN
0957-4522

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โœ Y. Huh; J.Y. Lee; J.H. Lee; T.J. Lee; S.C. Lyu; C.J. Lee ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 294 KB

We have achieved selective growth of high-purity carbon nanotubes (CNTs) on iron-deposited hole-patterns by thermal chemical vapor deposition (CVD) of acetylene gas. The vertically well-aligned CNTs were uniformly synthesized with good selectivity on hole-patterned silicon substrates. The CNTs indic