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Synthesis of well-aligned carbon nanotubes by inductively coupled plasma chemical vapor deposition

โœ Scribed by J.H. Yen; I.C. Leu; C.C. Lin; M.H. Hon


Publisher
Springer
Year
2005
Tongue
English
Weight
937 KB
Volume
80
Category
Article
ISSN
1432-0630

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Carbon-based molecular sieve membranes f
โœ Liang-Jun Wang; Franklin Chau-Nan Hong ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 345 KB

Carbon-based molecular sieve (CMS) films for gas separation have been deposited on porous Al 2 O 3 disks using hexamethyldisiloxane (HMDSO) by a remote inductively-coupled-plasma (ICP) chemical vapor deposition (CVD) method. The H 2 /N 2 selectivities of the as-deposited films falled into the range