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Selective deposition of tungsten by chemical vapour deposition from SiH4 reduction of WF6

✍ Scribed by Ph. Gouy-Pailler; Ph. Lami; R. Morales

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Study of the SiH4WF6 chemistry used in

✍ J.E.J. Schmitz; M.J. Buiting; R.C. Ellwanger 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 45 KB

Simulation of selective tungsten chemica

✍ K.J. Kuijlaars; C.R. Kleijn; H.E.A. van den Akker 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 394 KB

Chemical vapour deposition of tungsten b

✍ J.A.M. Ammerlaan; D.R.M. Boogaard; P.J. van der Put; J. Schoonman 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 634 KB

Step coverage of tungsten films deposite

✍ T.G.M. Oosterlaken; G.J. Leusink; G.C.A.M. Janssen; S. Radelaar 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 728 KB

Preparation of SiC-W2C nano-composite po

✍ Lidong Chen; Takashi Goto; Toshioz Hirai 📂 Article 📅 1993 🏛 Springer 🌐 English ⚖ 873 KB

Growth kinetics of low pressure chemical

✍ A.S Turtsevich; V.Y Krasnitsky; V.I Granko; V.P Lesnikova; I.V Smal; O.E Saryche 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 918 KB