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Chemical vapour deposition of tungsten by H2 reduction of WC16

✍ Scribed by J.A.M. Ammerlaan; D.R.M. Boogaard; P.J. van der Put; J. Schoonman

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 634 KB
Volume: 53
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(91)90237-e

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