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Selective Deposition of Thin Copper Films onto Silicon with Improved Adhesion

✍ Scribed by Magagnin, L.; Maboudian, R.; Carraro, C.


Book ID
118175526
Publisher
The Electrochemical Society
Year
2001
Tongue
English
Weight
567 KB
Volume
4
Category
Article
ISSN
1099-0062

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