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Selective deposition of gold nanoclusters on silicon by a galvanic displacement process

✍ Scribed by L. Magagnin; V. Bertani; P.L. Cavallotti; R. Maboudian; C. Carraro

Book ID
104305765
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
556 KB
Volume
64
Category
Article
ISSN
0167-9317

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✦ Synopsis

Gold nanoclusters are deposited selectively on silicon substrates by galvanic displacement from reversed micelle microemulsions. The water-in-oil system investigated comprises an organic phase (n-heptane), a surfactant (AOT), and an aqueous solution of hydrofluoric acid and metallic ions. X-ray diffraction and scanning electron microscopy are employed to investigate the correlation between the nominal size of the reversed micelles and the size of the metal clusters formed on the silicon substrate. The measured gold cluster radius is in good quantitative agreement with nominal micelle radius over a wide range of cluster size and deposition time.

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Fabrication of fine copper lines by sele
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✍ S. Vidal; A. Gleizes; D. Davazoglou πŸ“‚ Article πŸ“… 2001 πŸ› Elsevier Science 🌐 English βš– 771 KB

Fine copper lines, with a width of less than 1 mm, were fabricated on silicon substrates. For the fabrication, oxidized (100) silicon substrates were used, covered with a film grown by LPCVD at 0.1 Torr and 5508C from W(CO) decomposition. 6 These substrates were subsequently covered with AZ 5214E ph