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Selective deposition of diamond onto Si substrates using tetraethylorthosilicate SiO2 films as masks

✍ Scribed by Z Sun; Y He; X Wang; Y Sun; Z Zheng; C Xu; R Xu


Book ID
108388919
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
500 KB
Volume
289
Category
Article
ISSN
0040-6090

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