Selective area growth of GaAs and AlGaAs
Selective area growth of GaAs and AlGaAs with TMGa, TMAl, AsH3 and HCl by atmospheric pressure MOVPE
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L. Korte; Chr. Thanner; M. Huber; Ch. Hoyler
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Article
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1992
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Elsevier Science
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English
β 637 KB