Selective area growth of GaAs and AlGaAs with TMGa, TMAl, AsH3 and HCl by atmospheric pressure MOVPE

✍ Scribed by L. Korte; Chr. Thanner; M. Huber; Ch. Hoyler

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 637 KB
• Volume: 124
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(92)90463-s