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Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe

✍ Scribed by V. V. Alzoba, A. Yu. Kuzin, Yu. V. Larionov, A. V. Rakov, P. A. Todua, M. N. Filippov

No coin nor oath required. For personal study only.

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