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Secondary ion mass spectrometry of compositional changes in garnet films

✍ Scribed by H.D. Jonker; A.E. Morgan; H.W. Werner

Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
403 KB
Volume
31
Category
Article
ISSN
0022-0248

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The formation of thermally prepared ZrO, thin films on nickel and titanium supports from a hydrated ZrOCI, precursor was followed as a function of the calcination temperature by secondary ion mass spectrometry. Concentration depth profiles of selected species (e.g. 0 -, CI-, ZrO;, C,H;) were used t