✦ LIBER ✦
Cross-sectional composition investigations of sputtered tantalum nitride thin films by secondary ion mass spectrometry
✍ Scribed by V.P. Kolonits; M. Koltai; D. Marton
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 311 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0040-6090
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