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Secondary ion mass spectrometric ion yields and detection limits of impurities in indium phosphide

✍ Scribed by Tanaka, Toru.; Homma, Yoshikazu.; Kurosawa, Satoru.

Book ID
127292185
Publisher
American Chemical Society
Year
1988
Tongue
English
Weight
522 KB
Volume
60
Category
Article
ISSN
0003-2700

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## Abstract SIMS relative sensitivity factors and detection limits are reported for seventeen elements in epitaxially‐grown ZnSe on GaAs, using oxygen and cesium primary ion beams. Analytical considerations necessary for obtaining the lowest detection limits are discussed.