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Sealing elements used in semiconductor production equipment face a unique set of challenges. These seals must perform under positive pressure and vacuum conditions, in harsh chemical environments and at extremely high temperatures. Most importantly, they must not deteriorate, or in any way introduce contaminants (extractables or particles) into the processes in which they are used. This article discusses these challenges, and reports on a unique solution to a particularly challenging application developed by Greene, Tweed & Co to maintain sealing integrity in areas where the dovetail groove is used.
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