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Perfluoroelastomer seals for semiconductor industry


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
300 KB
Volume
2004
Category
Article
ISSN
1350-4789

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Sealing elements used in semiconductor production equipment face a unique set of challenges. These seals must perform under positive pressure and vacuum conditions, in harsh chemical environments and at extremely high temperatures. Most importantly, they must not deteriorate, or in any way introduce