The AirBarrier pump uses pressurized air to prevent fluid from entering the containment shell. the pump drive, are housed in a control panel and linked so that, when the operator increases or decreases pump speed, screw and plough/ bridge breaker are adjusted automatically. Construction is essenti
โฆ LIBER โฆ
Sealing the hottest semiconductor processes
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 207 KB
- Volume
- 1997
- Category
- Article
- ISSN
- 1350-4789
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