Scattering loss in silicon-on-insulator rib waveguides fabricated by inductively coupled plasma reactive ion etching

✍ Scribed by Wang, Yongjin; Lin, Zhilang; Cheng, Xinli; Zhang, Changsheng; Gao, Fan; Zhang, Feng

• Book ID: 121501525
• Publisher: American Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 652 KB
• Volume: 85
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1815063