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Scanning probe microscopy for silicon device fabrication

✍ Scribed by Simmons, M.Y.; Ruess, F.J.; Goh, K.E.J.; Hallam, T.; Schofield, S.R.; Oberbeck, L.; Curson, N.J.; Hamilton, A.R.; Butcher, M.J.; Clark, R.G.; Reusch, T.C.G.

Book ID: 126664897
Publisher: Taylor and Francis Group
Year: 2005
Tongue: English
Weight: 653 KB
Volume: 31
Category: Article
ISSN: 0892-7022
DOI: 10.1080/08927020500035580

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