Scanning magnetron-sputtered TiN coating as diffusion barrier for silicon devices

✍ Scribed by Lingwal, Vijendra; Panwar, N. S.

• Book ID: 120389616
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 592 KB
• Volume: 97
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1896433