✦ LIBER ✦
Optimization of plasma parameters for high rate deposition of titanium nitride films as protective coating on bell-metal by reactive sputtering in cylindrical magnetron device
✍ Scribed by Sankar Moni Borah; Arup Ratan Pal; Heremba Bailung; Joyanti Chutia
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 394 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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