Scandium dipivaloyl methanate as a volatile precursor for thin film deposition

A New OMCVD Iridium Precursor for Thin F

A New OMCVD Iridium Precursor for Thin Film Deposition

✍ P. Serp; R. Feurer; P. Kalck; H. Gomes; J. L. Faria; J. L. Figueiredo 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 326 KB 👁 2 views

ChemInform Abstract: A New OMCVD Iridium

ChemInform Abstract: A New OMCVD Iridium Precursor for Thin Film Deposition.

✍ Philippe Serp; Roselyne Feurer; Philippe Kalck; Helder Gomes; Joaquin Luis Faria 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 32 KB 👁 2 views

## Abstract ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a “Full Text” option. The original article is trackable v

Atomic layer deposition process with TiF

Atomic layer deposition process with TiF_4 as a precursor for depositing metal fluoride thin films

✍ Pilvi, Tero ;Ritala, Mikko ;Leskelä, Markku ;Bischoff, Martin ;Kaiser, Ute ;Kais 📂 Article 📅 2008 🏛 The Optical Society 🌐 English ⚖ 618 KB

TRIBUTYLBISMUTH AS A LIQUID BISMUTH PREC

TRIBUTYLBISMUTH AS A LIQUID BISMUTH PRECURSOR IN AN AVD SYSTEM FOR STRONTIUM BISMUTH TANTALATE THIN FILM DEPOSITION

✍ MATICHYN, S.; SILINSKAS, M.; LISKER, M.; BURTE, E. P.; LORENZ, V.; EDELMANN, F. 📂 Article 📅 2006 🏛 Taylor and Francis Group 🌐 English ⚖ 772 KB

Thermogravimetric Study of Volatile Prec

Thermogravimetric Study of Volatile Precursors For Chemical Thin Film Deposition. Estimation of vapor pressures and source temperatures

✍ A. Niskanen; T. Hatanpää; M. Ritala; M. Leskelä 📂 Article 📅 2001 🏛 Springer Netherlands 🌐 English ⚖ 102 KB

ChemInform Abstract: Lanthanide N,N-Dime

ChemInform Abstract: Lanthanide N,N-Dimethylaminodiboranates: Highly Volatile Precursors for the Deposition of Lanthanide-Containing Thin Films.

✍ Scott R. Daly; Do Young Kim; Yu Yang; John R. Abelson; Gregory S. Girolami 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 28 KB

## Abstract ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a “Full Text” option. The original article is trackable v