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Scaling properties of a Si surface patterned by selective chemical etching

✍ Scribed by G. Wisz; T.Ya. Gorbach; P.S. Smertenko; A. Blahut; K. Zembrowska; M. Kuzma

Book ID: 108268827
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 703 KB
Volume: 36
Category: Article
ISSN: 0749-6036
DOI: 10.1016/j.spmi.2004.08.020

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