Raman characterization of SiNx depositio
✍
B. Boudart; C. Gaquière; M. Constant; A. Lorriaux; N. Lefebvre
📂
Article
📅
1999
🏛
John Wiley and Sons
🌐
English
⚖ 93 KB
Effects of SiN x deposition on undoped Ga 0.47 In 0.53 As bulk layer grown on InP substrate were investigated using Raman spectroscopy. No Raman shift as a result of strain induced from the dielectric deposition was observed in the Ga 0.47 In 0.53 As material, whatever the thickness and the temperat