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Routine depth profiling of ultra shallow junctions by secondary ion mass spectrometry

✍ Scribed by Paul K. Chua; Victor K.F. Chia; Stephen P. Smith; Charles W. Magee

Book ID: 114194579
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 563 KB
Volume: 52
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(98)80007-2

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