✦ LIBER ✦

Role of kinetic energy of sputtered particles in thin film formation

✍ Scribed by Yasunori Taga; Riichi Takahasi

Book ID: 117217598
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 707 KB
Volume: 386
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(97)00313-0

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