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Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD

✍ Scribed by N. Sasaki; C. Lim; J. Hanna

Book ID
116670868
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
205 KB
Volume
354
Category
Article
ISSN
0022-3093

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