In-situ growth of superconducting MgB2 thin films by HPCVD method at low temperature
โ Scribed by J. Yang; S. Wang; F.S. Yang; Z.P. Zhang; Z. Ding; X.H. Fu
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 404 KB
- Volume
- 467
- Category
- Article
- ISSN
- 0921-4534
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โฆ Synopsis
An improved hybrid physical chemical vapor deposition (HPCVD) method for the preparation of magnesium diboride (MgB 2 ) films is proposed. In this experiment, the temperature for the evaporation of magnesium is set to be $700 ยฐC, while the substrate is kept below 500 ยฐC. Inside the vacuum chamber, double heaters control the temperature for the evaporation of Mg and of the substrate independently. The deposition of MgB 2 films on a polycrystalline Al 2 O 3 substrates is obtained by the reaction between evaporated magnesium atoms and boron atoms that decompose from diborane near the heaters. The superconducting MgB 2 films show a transition temperature at 38.5 K and a zero-resistance temperature at 38 K. The critical current density of the films is 10 5 A/cm 2 .
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