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Role of bismuth precursor in crystallization of SrBi2Ta2O9 thin films

✍ Scribed by D.R. Halfpenny; D.M. Kane; R.N. Lamb; B. Gong

Publisher
Springer
Year
2000
Tongue
English
Weight
129 KB
Volume
70
Category
Article
ISSN
1432-0630

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Role of interfacial diffusion in SrBi2Ta
Role of interfacial diffusion in SrBi2Ta2O9 thin-film capacitors
✍ Ai-Dong Li; Di Wu; Hui-Qin Ling; Tao Yu; Zhi-Guo Liu; Nai-Ben Ming πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 322 KB

SrBi Ta O (SBT) thin films were prepared on Pt / TiO / SiO / Si substrates by metalorganic decomposition 2 2 9 2 2 method. Impact of interfacial diffusion on structural and electrical properties of SBT film capacitors has been investigated by X-ray diffraction (XRD), scanning electron microscopy, Au