Metal-organic chemical vapour deposition of ferro-electric SrBi2Ta2O9 thin films
β Scribed by Chiharu Isobe; Katsuyuki Hironaka; Shinichi Hishikawa
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 315 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1616-301X
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## Abstract The monomeric tungsten oxoβfluoroalkoxide W(O)(CH~2~CF~3~)~4~ (1) was synthesized from W(O)Cl~4~ and CF~3~CH~2~OH in the presence of ammonia. It was used in atmospheric pressure chemical vapour deposition experiments to deposit nonβstoichiometric WO~2.9~ when used as a singleβsource pre