Metal-Organic Chemical Vapor Deposition of La2CuO4+x Thin Films with Gas Phase Composition Control
✍ Scribed by W. J. DeSisto; E. J. Cukauskas; B. J. Rappoli; J. C. Culbertson; J. H. Claassen
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 247 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0948-1907
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✦ Synopsis
Composition-controlled metal-organic chemical vapor deposition of La 2 CuO 4 thin films using ultraviolet absorption sensors to provide incoming precursor flux control is reported. These sensors provide a more flexible and sensitive alternative to ultrasonic sensors. The films were c-axis oriented and semiconducting as grown on LaAlO 3 substrates. Chemical oxidization at room temperature in a sodium hypobromite solution resulted in an expansion of the c-axis lattice parameter and the conversion of the semiconducting film into a superconductor with a zero-resistance transition temperature of 32 K.