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SrBi2Ta2O9ferroelectric thin film capacitors: degradation in a hydrogen ambient

✍ Scribed by W. Hartner; P. Bosk; G. Schindler; H. Bachhofer; M. Mört; H. Wendt; T. Mikolajick; C. Dehm; H. Schroeder; R. Waser

Publisher
Springer
Year
2003
Tongue
English
Weight
600 KB
Volume
77
Category
Article
ISSN
1432-0630

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Role of interfacial diffusion in SrBi2Ta
Role of interfacial diffusion in SrBi2Ta2O9 thin-film capacitors
✍ Ai-Dong Li; Di Wu; Hui-Qin Ling; Tao Yu; Zhi-Guo Liu; Nai-Ben Ming 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 322 KB

SrBi Ta O (SBT) thin films were prepared on Pt / TiO / SiO / Si substrates by metalorganic decomposition 2 2 9 2 2 method. Impact of interfacial diffusion on structural and electrical properties of SBT film capacitors has been investigated by X-ray diffraction (XRD), scanning electron microscopy, Au