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RF sputtering deposition of alternate TiN/ZrN multilayer hard coatings

โœ Scribed by A. Rizzo; M.A. Signore; M. Penza; M.A. Tagliente; F. De Riccardis; E. Serra


Book ID
108289312
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
299 KB
Volume
515
Category
Article
ISSN
0040-6090

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