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RF measurement technique for characterizing thin dielectric films

✍ Scribed by Zhengxiang Ma; Becker, A.J.; Polakos, P.; Huggins, H.; Pastalan, J.; Hui Wu; Watts, K.; Wong, Y.H.; Mankiewich, P.


Book ID
114537400
Publisher
IEEE
Year
1998
Tongue
English
Weight
147 KB
Volume
45
Category
Article
ISSN
0018-9383

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