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rf magnetron sputter deposition of transparent conducting Nb-doped TiO[sub 2] films on SrTiO[sub 3]

✍ Scribed by Gillispie, Meagen A.; van Hest, Maikel F. A. M.; Dabney, Matthew S.; Perkins, John D.; Ginley, David S.

Book ID: 120479292
Publisher: American Institute of Physics
Year: 2007
Tongue: English
Weight: 419 KB
Volume: 101
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2434005

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