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Electrical and optical properties of Nb-doped TiO[sub 2] films deposited by dc magnetron sputtering using slightly reduced Nb-doped TiO[sub 2−x] ceramic targets

✍ Scribed by Sato, Yasushi; Sanno, Yuta; Tasaki, Chihiro; Oka, Nobuto; Kamiyama, Toshihisa; Shigesato, Yuzo


Book ID
121686631
Publisher
AVS (American Vacuum Society)
Year
2010
Tongue
English
Weight
484 KB
Volume
28
Category
Article
ISSN
0734-2101

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