Review of modeling electrostatically actuated microelectromechanical systems
β Scribed by Batra, R C; Porfiri, M; Spinello, D
- Book ID
- 118154422
- Publisher
- Institute of Physics
- Year
- 2007
- Tongue
- English
- Weight
- 335 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0964-1726
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π SIMILAR VOLUMES
This work proposes a stochastic framework based on generalized polynomial chaos (GPC), to handle uncertain coupled electromechanical interaction, arising from variations in material properties and geometrical parameters such as gap between the microstructures, applicable to the static analysis of el
## Abstract This paper presents a geometric framework for the stabilization and control of a general class of electrostatically actuated mechanical systems. Microelectromechanical systems (MEMS), such as micromirrors, are one motivating application for this work. There wavelengths of applications o