Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirror

✍ Scribed by Fabien Parrain; Souhil Megherbi; Gilles Raynaud; Hervé Mathias; Jean-Paul Gilles; Alain Bosseboeuf; Gerold Schröpfer; Nicolas Faure; Pierre Cusin

• Book ID: 106184816
• Publisher: Springer-Verlag
• Year: 2005
• Tongue: English
• Weight: 585 KB
• Volume: 12
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-005-0027-5