Analytical modeling of static behavior of electrostatically actuated nano/micromirrors considering van der Waals forces

✍ Scribed by Hamid Moeenfard, Mohammad Taghi Ahmadian

• Book ID: 113060064
• Publisher: The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences
• Year: 2012
• Tongue: English
• Weight: 560 KB
• Volume: 28
• Category: Article
• ISSN: 0567-7718
• DOI: 10.1007/s10409-012-0105-8