Response function and optimum configuration of semiconductor backscattered-electron detectors for scanning electron microscopes

✍ Scribed by Rau, E. I.; Orlikovskiy, N. A.; Ivanova, E. S.

• Book ID: 114992438
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 201 KB
• Volume: 46
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782612060139