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Resistivity Correction Factor for Four-Probe Method on Circular Semiconductors II

✍ Scribed by Yamashita, Masato


Book ID
126241556
Publisher
Institute of Pure and Applied Physics
Year
1988
Tongue
English
Weight
636 KB
Volume
27
Category
Article
ISSN
0021-4922

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Correction factor for four-probe resisti
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## Abstract This article discusses the use of the four‐probe method for direct measurements of the resistance per square of a resistive sheet with parallel electrodes. These measurements must be adjusted by a correction factor, which is calculated in this work by modeling the resistive sheet as a t